Surfmera PROXIMA is an industrial nanoscale analysis workhorse that creates a powerful synergy between lab-grade precision and smart production-line automation.
It seamlessly merges unmatched stability for large samples with automation intelligence, transforming complex nanoscale research into fast, reproducible, and production-ready workflows.
KEY FEATURES
- Versatile Nanoscale Analysis: 50+ integrated techniques for comprehensive characterization;
- Nanometer-Scale Precision: lab-grade accuracy in industrial environments;
- Smart Automation: AI-enhanced workflows for faster R&D cycles.
APPLICATIONS AND MODES
Precision Wafer Roughness Inspection
- Comprehensive 200×200 mm wafer scanning;
- Automated analysis compliant with SEMI/ISO standards;
- 3D roughness maps and process-capability reports.
Comprehensive Morphological Analysis of Micro- and Nanostructures
- Sub-nanometer resolution 3D characterization;
- Precise measurement of feature height, lateral dimensions, and surface roughness;
- Automated scanning and intelligent analysis for rapid assessment.
Photoresist Performance Analysis for Lithography Optimization
- Nanoscale characterization of photoresist behavior;
- Rapid determination of optimal exposure parameters for lithography optimization;
- Precise measurement of exposure dose effects on 3D morphology.
2.5 × 2.5 μm
2x2x0,15 μm
1 × 1 μm
TECHNICAL CHARACTERISTICS
| Scanner | |||
| XYZ | standard | 100x100x10µ | |
| high resolution mode | 2x2x0,2µ | ||
| Noise level | XY | 300 pm in XY | |
| Z closed loop | 30 pm | ||
| XY open loop | 30 pm | ||
| Noise of the control electronics | 5 μV /√Hz | ||
| Probe-to-sample positioning | |||
| Movement | XY | 200×200 mm (300×300 mm optional) | |
| Z | 30 mm | ||
| Positioning speed along XY | 8 mm/s | ||
| XYZ thermal drift | 0.2 nm/min | ||
| Positioning repeatability | XY | less than 1 μm | |
| Z | Less than 0,2 μm | ||
| Light source | 850 nm SLD with FC single mode fiber | ||
| Cantilever bend registration system noise | 25* fm/√Hz above 50 kHz | ||
| Dimensions | |||
| W×L×H | 810×610×1450 mm | ||